4/3/2010	2:23:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/3/2010	2:23:54 PM	Recipe started at 2:23 PM
4/3/2010	2:23:54 PM	Helium valve closed
4/3/2010	2:23:54 PM	H2 valve closed
4/3/2010	2:23:54 PM	BCl3 valve closed
4/3/2010	2:23:54 PM	PH3 valve closed
4/3/2010	2:23:54 PM	SiCl4 pre valve closed
4/3/2010	2:23:54 PM	SiCl4 post valve closed
4/3/2010	2:23:54 PM	Main Vac valve closed
4/3/2010	2:23:54 PM	Bypass valve closed
4/3/2010	2:23:54 PM	Bubbler valve closed
4/3/2010	2:23:54 PM	Helium MFC set to  0.000000
4/3/2010	2:23:54 PM	H2 MFC set to  0.000000
4/3/2010	2:23:54 PM	BCl3 MFC set to  0.000000
4/3/2010	2:23:54 PM	SiCl4 MFC set to  0.000000
4/3/2010	2:23:54 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	2:23:54 PM	Tube furnace set to 0
4/3/2010	2:23:54 PM	Run finished at 2:23 PM
4/3/2010	2:23:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/3/2010	3:02:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	3:02:16 PM	Recipe started at 3:02 PM
4/3/2010	3:02:16 PM	Helium valve closed
4/3/2010	3:02:16 PM	H2 valve closed
4/3/2010	3:02:16 PM	BCl3 valve closed
4/3/2010	3:02:16 PM	PH3 valve closed
4/3/2010	3:02:16 PM	SiCl4 pre valve closed
4/3/2010	3:02:16 PM	SiCl4 post valve closed
4/3/2010	3:02:16 PM	Main Vac valve closed
4/3/2010	3:02:16 PM	Bubbler valve closed
4/3/2010	3:02:16 PM	Bypass valve opened
4/3/2010	3:02:16 PM	Helium MFC set to  0.000000
4/3/2010	3:02:16 PM	H2 MFC set to  0.000000
4/3/2010	3:02:16 PM	BCl3 MFC set to  0.000000
4/3/2010	3:02:16 PM	SiCl4 MFC set to  0.000000
4/3/2010	3:02:16 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	3:02:16 PM	Tube furnace set to 0
4/3/2010	3:02:16 PM	Helium valve closed
4/3/2010	3:02:16 PM	H2 valve closed
4/3/2010	3:02:16 PM	BCl3 valve closed
4/3/2010	3:02:16 PM	PH3 valve closed
4/3/2010	3:02:16 PM	SiCl4 pre valve closed
4/3/2010	3:02:16 PM	SiCl4 post valve closed
4/3/2010	3:02:16 PM	Bubbler valve closed
4/3/2010	3:02:16 PM	Main Vac valve opened
4/3/2010	3:02:16 PM	Bypass valve opened
4/3/2010	3:02:16 PM	Helium MFC set to  0.000000
4/3/2010	3:02:16 PM	H2 MFC set to  0.000000
4/3/2010	3:02:16 PM	BCl3 MFC set to  0.000000
4/3/2010	3:02:16 PM	SiCl4 MFC set to  0.000000
4/3/2010	3:02:16 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	3:02:16 PM	Tube furnace set to 0
4/3/2010	3:02:16 PM	Run finished at 3:02 PM
4/3/2010	3:02:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	3:02:36 PM	H2 valve opened
4/3/2010	3:03:10 PM	H2 MFC set to  500.000000
4/3/2010	3:05:58 PM	H2 valve closed
4/3/2010	3:06:53 PM	H2 valve opened
4/3/2010	3:09:34 PM	H2 valve closed
4/3/2010	3:15:09 PM	H2 valve opened
4/3/2010	3:17:50 PM	H2 valve closed
4/3/2010	3:45:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2010	3:45:37 PM	Recipe started at 3:45 PM
4/3/2010	3:45:37 PM	H2 valve closed
4/3/2010	3:45:37 PM	BCl3 valve closed
4/3/2010	3:45:37 PM	PH3 valve closed
4/3/2010	3:45:37 PM	SiCl4 pre valve closed
4/3/2010	3:45:37 PM	SiCl4 post valve closed
4/3/2010	3:45:37 PM	Main Vac valve closed
4/3/2010	3:45:37 PM	Bypass valve closed
4/3/2010	3:45:37 PM	Bubbler valve closed
4/3/2010	3:45:37 PM	Helium valve opened
4/3/2010	3:45:37 PM	Helium MFC set to  500.000000
4/3/2010	3:45:37 PM	H2 MFC set to  0.000000
4/3/2010	3:45:37 PM	BCl3 MFC set to  0.000000
4/3/2010	3:45:37 PM	SiCl4 MFC set to  0.000000
4/3/2010	3:45:37 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	3:45:38 PM	Tube furnace set to 0
4/3/2010	3:46:58 PM	Helium valve closed
4/3/2010	3:46:58 PM	H2 valve closed
4/3/2010	3:46:58 PM	BCl3 valve closed
4/3/2010	3:46:58 PM	PH3 valve closed
4/3/2010	3:46:58 PM	SiCl4 pre valve closed
4/3/2010	3:46:58 PM	SiCl4 post valve closed
4/3/2010	3:46:58 PM	Main Vac valve closed
4/3/2010	3:46:58 PM	Bypass valve closed
4/3/2010	3:46:58 PM	Bubbler valve closed
4/3/2010	3:46:58 PM	Helium MFC set to  0.000000
4/3/2010	3:46:58 PM	H2 MFC set to  0.000000
4/3/2010	3:46:58 PM	BCl3 MFC set to  0.000000
4/3/2010	3:46:58 PM	SiCl4 MFC set to  0.000000
4/3/2010	3:46:58 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	3:46:59 PM	Tube furnace set to 0
4/3/2010	3:46:59 PM	Run finished at 3:46 PM
4/3/2010	3:46:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2010	3:56:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	3:56:18 PM	Recipe started at 3:56 PM
4/3/2010	3:56:18 PM	Helium valve closed
4/3/2010	3:56:18 PM	H2 valve closed
4/3/2010	3:56:18 PM	BCl3 valve closed
4/3/2010	3:56:18 PM	PH3 valve closed
4/3/2010	3:56:18 PM	SiCl4 pre valve closed
4/3/2010	3:56:18 PM	SiCl4 post valve closed
4/3/2010	3:56:18 PM	Main Vac valve closed
4/3/2010	3:56:18 PM	Bubbler valve closed
4/3/2010	3:56:18 PM	Bypass valve opened
4/3/2010	3:56:18 PM	Helium MFC set to  0.000000
4/3/2010	3:56:18 PM	H2 MFC set to  0.000000
4/3/2010	3:56:18 PM	BCl3 MFC set to  0.000000
4/3/2010	3:56:18 PM	SiCl4 MFC set to  0.000000
4/3/2010	3:56:18 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	3:56:18 PM	Tube furnace set to 0
4/3/2010	3:56:48 PM	Run aborted at 3:56 PM
4/3/2010	3:56:48 PM	Helium valve closed
4/3/2010	3:56:48 PM	H2 valve closed
4/3/2010	3:56:48 PM	BCl3 valve closed
4/3/2010	3:56:48 PM	PH3 valve closed
4/3/2010	3:56:48 PM	SiCl4 pre valve closed
4/3/2010	3:56:48 PM	SiCl4 post valve closed
4/3/2010	3:56:48 PM	Bypass valve closed
4/3/2010	3:56:48 PM	Main Vac valve closed
4/3/2010	3:56:48 PM	Bubbler valve closed
4/3/2010	3:56:48 PM	Helium MFC set to  0.000000
4/3/2010	3:56:48 PM	H2 MFC set to  0.000000
4/3/2010	3:56:48 PM	BCl3 MFC set to  0.000000
4/3/2010	3:56:48 PM	SiCl4 MFC set to  0.000000
4/3/2010	3:56:48 PM	Tube furnace set to 0
4/3/2010	3:56:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	3:59:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	3:59:19 PM	Recipe started at 3:59 PM
4/3/2010	3:59:19 PM	Helium valve closed
4/3/2010	3:59:19 PM	H2 valve closed
4/3/2010	3:59:19 PM	BCl3 valve closed
4/3/2010	3:59:19 PM	PH3 valve closed
4/3/2010	3:59:19 PM	SiCl4 pre valve closed
4/3/2010	3:59:19 PM	SiCl4 post valve closed
4/3/2010	3:59:19 PM	Main Vac valve closed
4/3/2010	3:59:19 PM	Bubbler valve closed
4/3/2010	3:59:19 PM	Bypass valve opened
4/3/2010	3:59:19 PM	Helium MFC set to  0.000000
4/3/2010	3:59:19 PM	H2 MFC set to  0.000000
4/3/2010	3:59:19 PM	BCl3 MFC set to  0.000000
4/3/2010	3:59:19 PM	SiCl4 MFC set to  0.000000
4/3/2010	3:59:19 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	3:59:19 PM	Tube furnace set to 0
4/3/2010	4:00:02 PM	Run aborted at 4:00 PM
4/3/2010	4:00:02 PM	Helium valve closed
4/3/2010	4:00:02 PM	H2 valve closed
4/3/2010	4:00:02 PM	BCl3 valve closed
4/3/2010	4:00:02 PM	PH3 valve closed
4/3/2010	4:00:02 PM	SiCl4 pre valve closed
4/3/2010	4:00:02 PM	SiCl4 post valve closed
4/3/2010	4:00:02 PM	Bypass valve closed
4/3/2010	4:00:02 PM	Main Vac valve closed
4/3/2010	4:00:02 PM	Bubbler valve closed
4/3/2010	4:00:02 PM	Helium MFC set to  0.000000
4/3/2010	4:00:02 PM	H2 MFC set to  0.000000
4/3/2010	4:00:02 PM	BCl3 MFC set to  0.000000
4/3/2010	4:00:02 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:00:03 PM	Tube furnace set to 0
4/3/2010	4:00:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	4:00:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2010	4:00:06 PM	Recipe started at 4:00 PM
4/3/2010	4:00:06 PM	H2 valve closed
4/3/2010	4:00:06 PM	BCl3 valve closed
4/3/2010	4:00:06 PM	PH3 valve closed
4/3/2010	4:00:06 PM	SiCl4 pre valve closed
4/3/2010	4:00:06 PM	SiCl4 post valve closed
4/3/2010	4:00:06 PM	Main Vac valve closed
4/3/2010	4:00:06 PM	Bypass valve closed
4/3/2010	4:00:06 PM	Bubbler valve closed
4/3/2010	4:00:06 PM	Helium valve opened
4/3/2010	4:00:06 PM	Helium MFC set to  500.000000
4/3/2010	4:00:06 PM	H2 MFC set to  0.000000
4/3/2010	4:00:06 PM	BCl3 MFC set to  0.000000
4/3/2010	4:00:06 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:00:06 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:00:06 PM	Tube furnace set to 0
4/3/2010	4:00:12 PM	Helium valve closed
4/3/2010	4:00:12 PM	H2 valve closed
4/3/2010	4:00:12 PM	BCl3 valve closed
4/3/2010	4:00:12 PM	PH3 valve closed
4/3/2010	4:00:12 PM	SiCl4 pre valve closed
4/3/2010	4:00:12 PM	SiCl4 post valve closed
4/3/2010	4:00:12 PM	Main Vac valve closed
4/3/2010	4:00:12 PM	Bypass valve closed
4/3/2010	4:00:12 PM	Bubbler valve closed
4/3/2010	4:00:12 PM	Helium MFC set to  0.000000
4/3/2010	4:00:12 PM	H2 MFC set to  0.000000
4/3/2010	4:00:12 PM	BCl3 MFC set to  0.000000
4/3/2010	4:00:12 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:00:12 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:00:12 PM	Tube furnace set to 0
4/3/2010	4:00:13 PM	Run finished at 4:00 PM
4/3/2010	4:00:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2010	4:02:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	4:02:10 PM	Recipe started at 4:02 PM
4/3/2010	4:02:10 PM	Helium valve closed
4/3/2010	4:02:10 PM	H2 valve closed
4/3/2010	4:02:10 PM	BCl3 valve closed
4/3/2010	4:02:10 PM	PH3 valve closed
4/3/2010	4:02:10 PM	SiCl4 pre valve closed
4/3/2010	4:02:10 PM	SiCl4 post valve closed
4/3/2010	4:02:10 PM	Main Vac valve closed
4/3/2010	4:02:10 PM	Bubbler valve closed
4/3/2010	4:02:10 PM	Bypass valve opened
4/3/2010	4:02:10 PM	Helium MFC set to  0.000000
4/3/2010	4:02:10 PM	H2 MFC set to  0.000000
4/3/2010	4:02:10 PM	BCl3 MFC set to  0.000000
4/3/2010	4:02:10 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:02:10 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:02:10 PM	Tube furnace set to 0
4/3/2010	4:02:45 PM	Helium valve closed
4/3/2010	4:02:45 PM	H2 valve closed
4/3/2010	4:02:45 PM	BCl3 valve closed
4/3/2010	4:02:45 PM	PH3 valve closed
4/3/2010	4:02:45 PM	SiCl4 pre valve closed
4/3/2010	4:02:45 PM	SiCl4 post valve closed
4/3/2010	4:02:45 PM	Bubbler valve closed
4/3/2010	4:02:45 PM	Main Vac valve opened
4/3/2010	4:02:45 PM	Bypass valve opened
4/3/2010	4:02:45 PM	Helium MFC set to  0.000000
4/3/2010	4:02:45 PM	H2 MFC set to  0.000000
4/3/2010	4:02:45 PM	BCl3 MFC set to  0.000000
4/3/2010	4:02:46 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:02:46 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:02:46 PM	Tube furnace set to 0
4/3/2010	4:02:46 PM	Run finished at 4:02 PM
4/3/2010	4:02:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	4:03:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/3/2010	4:03:31 PM	Recipe started at 4:03 PM
4/3/2010	4:03:31 PM	H2 valve closed
4/3/2010	4:03:31 PM	BCl3 valve closed
4/3/2010	4:03:32 PM	PH3 valve closed
4/3/2010	4:03:32 PM	SiCl4 pre valve closed
4/3/2010	4:03:32 PM	SiCl4 post valve closed
4/3/2010	4:03:32 PM	Main Vac valve closed
4/3/2010	4:03:32 PM	Bypass valve closed
4/3/2010	4:03:32 PM	Bubbler valve closed
4/3/2010	4:03:32 PM	Helium valve opened
4/3/2010	4:03:32 PM	Helium MFC set to  500.000000
4/3/2010	4:03:32 PM	H2 MFC set to  0.000000
4/3/2010	4:03:32 PM	BCl3 MFC set to  0.000000
4/3/2010	4:03:32 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:03:32 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:03:32 PM	Tube furnace set to 0
4/3/2010	4:04:54 PM	Helium valve closed
4/3/2010	4:04:54 PM	H2 valve closed
4/3/2010	4:04:54 PM	BCl3 valve closed
4/3/2010	4:04:54 PM	PH3 valve closed
4/3/2010	4:04:54 PM	SiCl4 pre valve closed
4/3/2010	4:04:54 PM	SiCl4 post valve closed
4/3/2010	4:04:54 PM	Main Vac valve closed
4/3/2010	4:04:54 PM	Bypass valve closed
4/3/2010	4:04:54 PM	Bubbler valve closed
4/3/2010	4:04:54 PM	Helium MFC set to  0.000000
4/3/2010	4:04:54 PM	H2 MFC set to  0.000000
4/3/2010	4:04:54 PM	BCl3 MFC set to  0.000000
4/3/2010	4:04:54 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:04:54 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:04:55 PM	Tube furnace set to 0
4/3/2010	4:05:10 PM	Helium valve closed
4/3/2010	4:05:10 PM	H2 valve closed
4/3/2010	4:05:10 PM	BCl3 valve closed
4/3/2010	4:05:10 PM	PH3 valve closed
4/3/2010	4:05:10 PM	SiCl4 pre valve closed
4/3/2010	4:05:10 PM	SiCl4 post valve closed
4/3/2010	4:05:10 PM	Main Vac valve closed
4/3/2010	4:05:10 PM	Bubbler valve closed
4/3/2010	4:05:10 PM	Bypass valve opened
4/3/2010	4:05:10 PM	Helium MFC set to  0.000000
4/3/2010	4:05:10 PM	H2 MFC set to  0.000000
4/3/2010	4:05:10 PM	BCl3 MFC set to  0.000000
4/3/2010	4:05:10 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:05:10 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:05:10 PM	Tube furnace set to 0
4/3/2010	4:05:33 PM	Helium valve closed
4/3/2010	4:05:33 PM	H2 valve closed
4/3/2010	4:05:33 PM	BCl3 valve closed
4/3/2010	4:05:33 PM	PH3 valve closed
4/3/2010	4:05:33 PM	SiCl4 pre valve closed
4/3/2010	4:05:33 PM	SiCl4 post valve closed
4/3/2010	4:05:33 PM	Bubbler valve closed
4/3/2010	4:05:33 PM	Main Vac valve opened
4/3/2010	4:05:33 PM	Bypass valve opened
4/3/2010	4:05:33 PM	Helium MFC set to  0.000000
4/3/2010	4:05:33 PM	H2 MFC set to  0.000000
4/3/2010	4:05:33 PM	BCl3 MFC set to  0.000000
4/3/2010	4:05:33 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:05:33 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:05:33 PM	Tube furnace set to 0
4/3/2010	4:10:33 PM	H2 valve closed
4/3/2010	4:10:33 PM	BCl3 valve closed
4/3/2010	4:10:33 PM	PH3 valve closed
4/3/2010	4:10:33 PM	SiCl4 pre valve closed
4/3/2010	4:10:33 PM	SiCl4 post valve closed
4/3/2010	4:10:33 PM	Main Vac valve closed
4/3/2010	4:10:33 PM	Bypass valve closed
4/3/2010	4:10:33 PM	Bubbler valve closed
4/3/2010	4:10:33 PM	Helium valve opened
4/3/2010	4:10:33 PM	Helium MFC set to  500.000000
4/3/2010	4:10:33 PM	H2 MFC set to  0.000000
4/3/2010	4:10:33 PM	BCl3 MFC set to  0.000000
4/3/2010	4:10:33 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:10:33 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:10:33 PM	Tube furnace set to 0
4/3/2010	4:11:56 PM	Helium valve closed
4/3/2010	4:11:56 PM	H2 valve closed
4/3/2010	4:11:56 PM	BCl3 valve closed
4/3/2010	4:11:56 PM	PH3 valve closed
4/3/2010	4:11:56 PM	SiCl4 pre valve closed
4/3/2010	4:11:56 PM	SiCl4 post valve closed
4/3/2010	4:11:56 PM	Main Vac valve closed
4/3/2010	4:11:56 PM	Bypass valve closed
4/3/2010	4:11:56 PM	Bubbler valve closed
4/3/2010	4:11:56 PM	Helium MFC set to  0.000000
4/3/2010	4:11:56 PM	H2 MFC set to  0.000000
4/3/2010	4:11:56 PM	BCl3 MFC set to  0.000000
4/3/2010	4:11:56 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:11:56 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:11:56 PM	Tube furnace set to 0
4/3/2010	4:12:11 PM	Helium valve closed
4/3/2010	4:12:11 PM	H2 valve closed
4/3/2010	4:12:11 PM	BCl3 valve closed
4/3/2010	4:12:11 PM	PH3 valve closed
4/3/2010	4:12:11 PM	SiCl4 pre valve closed
4/3/2010	4:12:11 PM	SiCl4 post valve closed
4/3/2010	4:12:11 PM	Main Vac valve closed
4/3/2010	4:12:11 PM	Bubbler valve closed
4/3/2010	4:12:11 PM	Bypass valve opened
4/3/2010	4:12:11 PM	Helium MFC set to  0.000000
4/3/2010	4:12:11 PM	H2 MFC set to  0.000000
4/3/2010	4:12:11 PM	BCl3 MFC set to  0.000000
4/3/2010	4:12:11 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:12:11 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:12:11 PM	Tube furnace set to 0
4/3/2010	4:12:34 PM	Helium valve closed
4/3/2010	4:12:34 PM	H2 valve closed
4/3/2010	4:12:34 PM	BCl3 valve closed
4/3/2010	4:12:34 PM	PH3 valve closed
4/3/2010	4:12:34 PM	SiCl4 pre valve closed
4/3/2010	4:12:34 PM	SiCl4 post valve closed
4/3/2010	4:12:34 PM	Bubbler valve closed
4/3/2010	4:12:34 PM	Main Vac valve opened
4/3/2010	4:12:34 PM	Bypass valve opened
4/3/2010	4:12:34 PM	Helium MFC set to  0.000000
4/3/2010	4:12:34 PM	H2 MFC set to  0.000000
4/3/2010	4:12:34 PM	BCl3 MFC set to  0.000000
4/3/2010	4:12:34 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:12:34 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:12:34 PM	Tube furnace set to 0
4/3/2010	4:17:34 PM	H2 valve closed
4/3/2010	4:17:34 PM	BCl3 valve closed
4/3/2010	4:17:34 PM	PH3 valve closed
4/3/2010	4:17:34 PM	SiCl4 pre valve closed
4/3/2010	4:17:34 PM	SiCl4 post valve closed
4/3/2010	4:17:34 PM	Main Vac valve closed
4/3/2010	4:17:34 PM	Bypass valve closed
4/3/2010	4:17:34 PM	Bubbler valve closed
4/3/2010	4:17:34 PM	Helium valve opened
4/3/2010	4:17:34 PM	Helium MFC set to  500.000000
4/3/2010	4:17:34 PM	H2 MFC set to  0.000000
4/3/2010	4:17:34 PM	BCl3 MFC set to  0.000000
4/3/2010	4:17:34 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:17:34 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:17:34 PM	Tube furnace set to 0
4/3/2010	4:18:55 PM	Helium valve closed
4/3/2010	4:18:55 PM	H2 valve closed
4/3/2010	4:18:55 PM	BCl3 valve closed
4/3/2010	4:18:55 PM	PH3 valve closed
4/3/2010	4:18:55 PM	SiCl4 pre valve closed
4/3/2010	4:18:55 PM	SiCl4 post valve closed
4/3/2010	4:18:55 PM	Main Vac valve closed
4/3/2010	4:18:55 PM	Bypass valve closed
4/3/2010	4:18:55 PM	Bubbler valve closed
4/3/2010	4:18:55 PM	Helium MFC set to  0.000000
4/3/2010	4:18:55 PM	H2 MFC set to  0.000000
4/3/2010	4:18:55 PM	BCl3 MFC set to  0.000000
4/3/2010	4:18:55 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:18:55 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:18:56 PM	Tube furnace set to 0
4/3/2010	4:19:11 PM	Helium valve closed
4/3/2010	4:19:11 PM	H2 valve closed
4/3/2010	4:19:11 PM	BCl3 valve closed
4/3/2010	4:19:11 PM	PH3 valve closed
4/3/2010	4:19:11 PM	SiCl4 pre valve closed
4/3/2010	4:19:11 PM	SiCl4 post valve closed
4/3/2010	4:19:11 PM	Main Vac valve closed
4/3/2010	4:19:11 PM	Bubbler valve closed
4/3/2010	4:19:11 PM	Bypass valve opened
4/3/2010	4:19:11 PM	Helium MFC set to  0.000000
4/3/2010	4:19:11 PM	H2 MFC set to  0.000000
4/3/2010	4:19:11 PM	BCl3 MFC set to  0.000000
4/3/2010	4:19:11 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:19:11 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:19:11 PM	Tube furnace set to 0
4/3/2010	4:19:33 PM	Helium valve closed
4/3/2010	4:19:33 PM	H2 valve closed
4/3/2010	4:19:33 PM	BCl3 valve closed
4/3/2010	4:19:33 PM	PH3 valve closed
4/3/2010	4:19:33 PM	SiCl4 pre valve closed
4/3/2010	4:19:33 PM	SiCl4 post valve closed
4/3/2010	4:19:33 PM	Bubbler valve closed
4/3/2010	4:19:33 PM	Main Vac valve opened
4/3/2010	4:19:33 PM	Bypass valve opened
4/3/2010	4:19:33 PM	Helium MFC set to  0.000000
4/3/2010	4:19:33 PM	H2 MFC set to  0.000000
4/3/2010	4:19:33 PM	BCl3 MFC set to  0.000000
4/3/2010	4:19:33 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:19:33 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:19:33 PM	Tube furnace set to 0
4/3/2010	4:23:44 PM	Helium valve closed
4/3/2010	4:23:44 PM	H2 valve closed
4/3/2010	4:23:44 PM	BCl3 valve closed
4/3/2010	4:23:44 PM	PH3 valve closed
4/3/2010	4:23:44 PM	SiCl4 pre valve closed
4/3/2010	4:23:44 PM	SiCl4 post valve closed
4/3/2010	4:23:44 PM	Bubbler valve closed
4/3/2010	4:23:44 PM	Main Vac valve opened
4/3/2010	4:23:44 PM	Bypass valve opened
4/3/2010	4:23:44 PM	Helium MFC set to  0.000000
4/3/2010	4:23:44 PM	H2 MFC set to  0.000000
4/3/2010	4:23:44 PM	BCl3 MFC set to  0.000000
4/3/2010	4:23:44 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:23:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:23:44 PM	Tube furnace set to 0
4/3/2010	4:23:45 PM	Run finished at 4:23 PM
4/3/2010	4:23:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/3/2010	4:23:56 PM	H2 MFC set to  20.000000
4/3/2010	4:23:59 PM	H2 valve opened
4/3/2010	4:24:05 PM	H2 valve closed
4/3/2010	4:24:32 PM	H2 valve opened
4/3/2010	4:24:47 PM	H2 valve closed
4/3/2010	4:32:48 PM	H2 valve opened
4/3/2010	4:33:05 PM	H2 valve closed
4/3/2010	4:33:12 PM	Helium MFC set to  20.000000
4/3/2010	4:33:14 PM	Helium valve opened
4/3/2010	4:33:53 PM	H2 valve opened
4/3/2010	4:33:58 PM	Helium valve closed
4/3/2010	4:34:02 PM	H2 valve closed
4/3/2010	4:34:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/3/2010	4:34:53 PM	Recipe started at 4:34 PM
4/3/2010	4:34:53 PM	Helium valve closed
4/3/2010	4:34:53 PM	H2 valve closed
4/3/2010	4:34:53 PM	BCl3 valve closed
4/3/2010	4:34:53 PM	PH3 valve closed
4/3/2010	4:34:53 PM	SiCl4 pre valve closed
4/3/2010	4:34:53 PM	SiCl4 post valve closed
4/3/2010	4:34:53 PM	Main Vac valve closed
4/3/2010	4:34:53 PM	Bypass valve closed
4/3/2010	4:34:53 PM	Bubbler valve closed
4/3/2010	4:34:53 PM	Helium MFC set to  0.000000
4/3/2010	4:34:53 PM	H2 MFC set to  0.000000
4/3/2010	4:34:53 PM	BCl3 MFC set to  0.000000
4/3/2010	4:34:53 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:34:53 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:34:53 PM	Tube furnace set to 0
4/3/2010	4:34:53 PM	Run finished at 4:34 PM
4/3/2010	4:34:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/3/2010	4:35:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	4:35:12 PM	Recipe started at 4:35 PM
4/3/2010	4:35:12 PM	Helium valve closed
4/3/2010	4:35:12 PM	H2 valve closed
4/3/2010	4:35:12 PM	BCl3 valve closed
4/3/2010	4:35:12 PM	PH3 valve closed
4/3/2010	4:35:12 PM	SiCl4 pre valve closed
4/3/2010	4:35:12 PM	SiCl4 post valve closed
4/3/2010	4:35:12 PM	Main Vac valve closed
4/3/2010	4:35:12 PM	Bubbler valve closed
4/3/2010	4:35:12 PM	Bypass valve opened
4/3/2010	4:35:12 PM	Helium MFC set to  0.000000
4/3/2010	4:35:12 PM	H2 MFC set to  0.000000
4/3/2010	4:35:12 PM	BCl3 MFC set to  0.000000
4/3/2010	4:35:12 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:35:12 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:35:12 PM	Tube furnace set to 0
4/3/2010	4:35:12 PM	Helium valve closed
4/3/2010	4:35:12 PM	H2 valve closed
4/3/2010	4:35:12 PM	BCl3 valve closed
4/3/2010	4:35:12 PM	PH3 valve closed
4/3/2010	4:35:12 PM	SiCl4 pre valve closed
4/3/2010	4:35:12 PM	SiCl4 post valve closed
4/3/2010	4:35:12 PM	Bubbler valve closed
4/3/2010	4:35:12 PM	Main Vac valve opened
4/3/2010	4:35:12 PM	Bypass valve opened
4/3/2010	4:35:12 PM	Helium MFC set to  0.000000
4/3/2010	4:35:12 PM	H2 MFC set to  0.000000
4/3/2010	4:35:12 PM	BCl3 MFC set to  0.000000
4/3/2010	4:35:12 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:35:12 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:35:13 PM	Tube furnace set to 0
4/3/2010	4:35:13 PM	Run finished at 4:35 PM
4/3/2010	4:35:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	4:35:24 PM	H2 valve opened
4/3/2010	4:35:25 PM	H2 valve closed
4/3/2010	4:35:30 PM	H2 MFC set to  50.000000
4/3/2010	4:35:31 PM	H2 valve opened
4/3/2010	4:35:50 PM	Helium MFC set to  20.000000
4/3/2010	4:35:51 PM	Helium valve opened
4/3/2010	4:36:05 PM	H2 valve closed
4/3/2010	4:36:08 PM	Helium valve closed
4/3/2010	4:37:23 PM	Recipe started at 4:37 PM
4/3/2010	4:37:23 PM	Helium valve closed
4/3/2010	4:37:23 PM	BCl3 valve closed
4/3/2010	4:37:23 PM	PH3 valve closed
4/3/2010	4:37:23 PM	SiCl4 pre valve closed
4/3/2010	4:37:23 PM	SiCl4 post valve closed
4/3/2010	4:37:23 PM	Main Vac valve closed
4/3/2010	4:37:23 PM	Bypass valve closed
4/3/2010	4:37:23 PM	Bubbler valve closed
4/3/2010	4:37:23 PM	H2 valve opened
4/3/2010	4:37:23 PM	Helium MFC set to  0.000000
4/3/2010	4:37:23 PM	H2 MFC set to  500.000000
4/3/2010	4:37:23 PM	BCl3 MFC set to  0.000000
4/3/2010	4:37:23 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:37:23 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:37:24 PM	Tube furnace set to 0
4/3/2010	4:38:44 PM	Helium valve closed
4/3/2010	4:38:44 PM	BCl3 valve closed
4/3/2010	4:38:44 PM	PH3 valve closed
4/3/2010	4:38:44 PM	SiCl4 pre valve closed
4/3/2010	4:38:44 PM	SiCl4 post valve closed
4/3/2010	4:38:44 PM	Main Vac valve closed
4/3/2010	4:38:44 PM	Bypass valve closed
4/3/2010	4:38:44 PM	H2 valve opened
4/3/2010	4:38:44 PM	Bubbler valve opened
4/3/2010	4:38:44 PM	Helium MFC set to  0.000000
4/3/2010	4:38:44 PM	H2 MFC set to  500.000000
4/3/2010	4:38:44 PM	BCl3 MFC set to  0.000000
4/3/2010	4:38:44 PM	SiCl4 MFC set to  0.000000
4/3/2010	4:38:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:38:44 PM	Tube furnace set to 1000
4/3/2010	4:58:44 PM	Helium valve closed
4/3/2010	4:58:44 PM	BCl3 valve closed
4/3/2010	4:58:44 PM	PH3 valve closed
4/3/2010	4:58:44 PM	Main Vac valve closed
4/3/2010	4:58:44 PM	Bypass valve closed
4/3/2010	4:58:44 PM	H2 valve opened
4/3/2010	4:58:44 PM	SiCl4 pre valve opened
4/3/2010	4:58:44 PM	SiCl4 post valve opened
4/3/2010	4:58:44 PM	Bubbler valve opened
4/3/2010	4:58:44 PM	Helium MFC set to  0.000000
4/3/2010	4:58:44 PM	H2 MFC set to  500.000000
4/3/2010	4:58:44 PM	BCl3 MFC set to  0.000000
4/3/2010	4:58:44 PM	SiCl4 MFC set to  325.000000
4/3/2010	4:58:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	4:58:44 PM	Tube furnace set to 1000
4/3/2010	5:18:44 PM	H2 valve closed
4/3/2010	5:18:44 PM	BCl3 valve closed
4/3/2010	5:18:44 PM	PH3 valve closed
4/3/2010	5:18:44 PM	SiCl4 pre valve closed
4/3/2010	5:18:44 PM	SiCl4 post valve closed
4/3/2010	5:18:44 PM	Main Vac valve closed
4/3/2010	5:18:44 PM	Bypass valve closed
4/3/2010	5:18:44 PM	Helium valve opened
4/3/2010	5:18:44 PM	Bubbler valve opened
4/3/2010	5:18:44 PM	Helium MFC set to  500.000000
4/3/2010	5:18:44 PM	H2 MFC set to  0.000000
4/3/2010	5:18:44 PM	BCl3 MFC set to  0.000000
4/3/2010	5:18:44 PM	SiCl4 MFC set to  0.000000
4/3/2010	5:18:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	5:18:44 PM	Tube furnace set to 750
4/3/2010	5:38:44 PM	H2 valve closed
4/3/2010	5:38:44 PM	BCl3 valve closed
4/3/2010	5:38:44 PM	PH3 valve closed
4/3/2010	5:38:44 PM	SiCl4 pre valve closed
4/3/2010	5:38:44 PM	SiCl4 post valve closed
4/3/2010	5:38:44 PM	Main Vac valve closed
4/3/2010	5:38:44 PM	Bypass valve closed
4/3/2010	5:38:44 PM	Helium valve opened
4/3/2010	5:38:44 PM	Bubbler valve opened
4/3/2010	5:38:44 PM	Helium MFC set to  500.000000
4/3/2010	5:38:44 PM	H2 MFC set to  0.000000
4/3/2010	5:38:44 PM	BCl3 MFC set to  0.000000
4/3/2010	5:38:44 PM	SiCl4 MFC set to  0.000000
4/3/2010	5:38:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	5:38:45 PM	Tube furnace set to 0
4/3/2010	5:48:36 PM	Helium valve closed
4/3/2010	5:48:36 PM	H2 valve closed
4/3/2010	5:48:36 PM	BCl3 valve closed
4/3/2010	5:48:36 PM	PH3 valve closed
4/3/2010	5:48:36 PM	SiCl4 pre valve closed
4/3/2010	5:48:36 PM	SiCl4 post valve closed
4/3/2010	5:48:36 PM	Main Vac valve closed
4/3/2010	5:48:36 PM	Bypass valve closed
4/3/2010	5:48:36 PM	Bubbler valve closed
4/3/2010	5:48:36 PM	Helium MFC set to  0.000000
4/3/2010	5:48:36 PM	H2 MFC set to  0.000000
4/3/2010	5:48:36 PM	BCl3 MFC set to  0.000000
4/3/2010	5:48:36 PM	SiCl4 MFC set to  0.000000
4/3/2010	5:48:36 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	5:48:36 PM	Tube furnace set to 0
4/3/2010	5:48:37 PM	Run finished at 5:48 PM
4/3/2010	5:51:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	5:51:43 PM	Recipe started at 5:51 PM
4/3/2010	5:51:43 PM	Helium valve closed
4/3/2010	5:51:43 PM	H2 valve closed
4/3/2010	5:51:43 PM	BCl3 valve closed
4/3/2010	5:51:43 PM	PH3 valve closed
4/3/2010	5:51:43 PM	SiCl4 pre valve closed
4/3/2010	5:51:43 PM	SiCl4 post valve closed
4/3/2010	5:51:43 PM	Main Vac valve closed
4/3/2010	5:51:43 PM	Bubbler valve closed
4/3/2010	5:51:43 PM	Bypass valve opened
4/3/2010	5:51:43 PM	Helium MFC set to  0.000000
4/3/2010	5:51:43 PM	H2 MFC set to  0.000000
4/3/2010	5:51:43 PM	BCl3 MFC set to  0.000000
4/3/2010	5:51:43 PM	SiCl4 MFC set to  0.000000
4/3/2010	5:51:43 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	5:51:44 PM	Tube furnace set to 0
4/3/2010	5:52:13 PM	Helium valve closed
4/3/2010	5:52:13 PM	H2 valve closed
4/3/2010	5:52:13 PM	BCl3 valve closed
4/3/2010	5:52:13 PM	PH3 valve closed
4/3/2010	5:52:13 PM	SiCl4 pre valve closed
4/3/2010	5:52:13 PM	SiCl4 post valve closed
4/3/2010	5:52:13 PM	Bubbler valve closed
4/3/2010	5:52:13 PM	Main Vac valve opened
4/3/2010	5:52:13 PM	Bypass valve opened
4/3/2010	5:52:13 PM	Helium MFC set to  0.000000
4/3/2010	5:52:13 PM	H2 MFC set to  0.000000
4/3/2010	5:52:13 PM	BCl3 MFC set to  0.000000
4/3/2010	5:52:13 PM	SiCl4 MFC set to  0.000000
4/3/2010	5:52:13 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	5:52:14 PM	Tube furnace set to 0
4/3/2010	5:52:14 PM	Run finished at 5:52 PM
4/3/2010	5:52:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	5:52:40 PM	H2 MFC set to  30.000000
4/3/2010	5:52:41 PM	H2 valve opened
4/3/2010	5:53:02 PM	H2 valve closed
4/3/2010	5:53:13 PM	Helium MFC set to  30.000000
4/3/2010	5:53:14 PM	Helium valve opened
4/3/2010	5:55:34 PM	Helium valve closed
4/3/2010	5:56:53 PM	Helium valve opened
4/3/2010	5:56:57 PM	H2 valve opened
4/3/2010	5:57:23 PM	Helium valve closed
4/3/2010	5:57:30 PM	H2 valve closed
4/3/2010	5:59:20 PM	H2 valve opened
4/3/2010	6:01:29 PM	H2 valve closed
4/3/2010	6:02:27 PM	Recipe started at 6:02 PM
4/3/2010	6:02:27 PM	Helium valve closed
4/3/2010	6:02:27 PM	BCl3 valve closed
4/3/2010	6:02:27 PM	PH3 valve closed
4/3/2010	6:02:27 PM	SiCl4 pre valve closed
4/3/2010	6:02:27 PM	SiCl4 post valve closed
4/3/2010	6:02:27 PM	Main Vac valve closed
4/3/2010	6:02:27 PM	Bypass valve closed
4/3/2010	6:02:27 PM	Bubbler valve closed
4/3/2010	6:02:27 PM	H2 valve opened
4/3/2010	6:02:27 PM	Helium MFC set to  0.000000
4/3/2010	6:02:27 PM	H2 MFC set to  500.000000
4/3/2010	6:02:27 PM	BCl3 MFC set to  0.000000
4/3/2010	6:02:27 PM	SiCl4 MFC set to  0.000000
4/3/2010	6:02:27 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	6:02:28 PM	Tube furnace set to 0
4/3/2010	6:03:45 PM	Helium valve closed
4/3/2010	6:03:45 PM	BCl3 valve closed
4/3/2010	6:03:45 PM	PH3 valve closed
4/3/2010	6:03:45 PM	SiCl4 pre valve closed
4/3/2010	6:03:45 PM	SiCl4 post valve closed
4/3/2010	6:03:45 PM	Main Vac valve closed
4/3/2010	6:03:45 PM	Bypass valve closed
4/3/2010	6:03:45 PM	H2 valve opened
4/3/2010	6:03:45 PM	Bubbler valve opened
4/3/2010	6:03:45 PM	Helium MFC set to  0.000000
4/3/2010	6:03:45 PM	H2 MFC set to  500.000000
4/3/2010	6:03:45 PM	BCl3 MFC set to  0.000000
4/3/2010	6:03:45 PM	SiCl4 MFC set to  0.000000
4/3/2010	6:03:45 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	6:03:45 PM	Tube furnace set to 1000
4/3/2010	6:23:45 PM	Helium valve closed
4/3/2010	6:23:45 PM	BCl3 valve closed
4/3/2010	6:23:45 PM	PH3 valve closed
4/3/2010	6:23:45 PM	Main Vac valve closed
4/3/2010	6:23:45 PM	Bypass valve closed
4/3/2010	6:23:45 PM	H2 valve opened
4/3/2010	6:23:45 PM	SiCl4 pre valve opened
4/3/2010	6:23:45 PM	SiCl4 post valve opened
4/3/2010	6:23:45 PM	Bubbler valve opened
4/3/2010	6:23:45 PM	Helium MFC set to  0.000000
4/3/2010	6:23:45 PM	H2 MFC set to  500.000000
4/3/2010	6:23:45 PM	BCl3 MFC set to  0.000000
4/3/2010	6:23:45 PM	SiCl4 MFC set to  325.000000
4/3/2010	6:23:45 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	6:23:45 PM	Tube furnace set to 1000
4/3/2010	6:43:45 PM	H2 valve closed
4/3/2010	6:43:45 PM	BCl3 valve closed
4/3/2010	6:43:45 PM	PH3 valve closed
4/3/2010	6:43:45 PM	SiCl4 pre valve closed
4/3/2010	6:43:45 PM	SiCl4 post valve closed
4/3/2010	6:43:45 PM	Main Vac valve closed
4/3/2010	6:43:45 PM	Bypass valve closed
4/3/2010	6:43:45 PM	Helium valve opened
4/3/2010	6:43:45 PM	Bubbler valve opened
4/3/2010	6:43:45 PM	Helium MFC set to  500.000000
4/3/2010	6:43:45 PM	H2 MFC set to  0.000000
4/3/2010	6:43:45 PM	BCl3 MFC set to  0.000000
4/3/2010	6:43:45 PM	SiCl4 MFC set to  0.000000
4/3/2010	6:43:45 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	6:43:45 PM	Tube furnace set to 750
4/3/2010	6:56:10 PM	H2 valve closed
4/3/2010	6:56:10 PM	BCl3 valve closed
4/3/2010	6:56:10 PM	PH3 valve closed
4/3/2010	6:56:10 PM	SiCl4 pre valve closed
4/3/2010	6:56:10 PM	SiCl4 post valve closed
4/3/2010	6:56:10 PM	Main Vac valve closed
4/3/2010	6:56:10 PM	Bypass valve closed
4/3/2010	6:56:10 PM	Helium valve opened
4/3/2010	6:56:10 PM	Bubbler valve opened
4/3/2010	6:56:10 PM	Helium MFC set to  500.000000
4/3/2010	6:56:10 PM	H2 MFC set to  0.000000
4/3/2010	6:56:10 PM	BCl3 MFC set to  0.000000
4/3/2010	6:56:10 PM	SiCl4 MFC set to  0.000000
4/3/2010	6:56:10 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	6:56:10 PM	Tube furnace set to 0
4/3/2010	6:57:03 PM	Helium valve closed
4/3/2010	6:57:03 PM	H2 valve closed
4/3/2010	6:57:03 PM	BCl3 valve closed
4/3/2010	6:57:04 PM	PH3 valve closed
4/3/2010	6:57:04 PM	SiCl4 pre valve closed
4/3/2010	6:57:04 PM	SiCl4 post valve closed
4/3/2010	6:57:04 PM	Main Vac valve closed
4/3/2010	6:57:04 PM	Bypass valve closed
4/3/2010	6:57:04 PM	Bubbler valve closed
4/3/2010	6:57:04 PM	Helium MFC set to  0.000000
4/3/2010	6:57:04 PM	H2 MFC set to  0.000000
4/3/2010	6:57:04 PM	BCl3 MFC set to  0.000000
4/3/2010	6:57:04 PM	SiCl4 MFC set to  0.000000
4/3/2010	6:57:04 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	6:57:04 PM	Tube furnace set to 0
4/3/2010	6:57:04 PM	Run finished at 6:57 PM
4/3/2010	6:58:03 PM	H2 MFC set to  500.000000
4/3/2010	6:58:06 PM	H2 valve opened
4/3/2010	6:58:08 PM	Bubbler valve opened
4/3/2010	6:58:18 PM	Bubbler valve closed
4/3/2010	6:58:19 PM	H2 valve closed
4/3/2010	7:03:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2010	7:03:16 PM	Recipe started at 7:03 PM
4/3/2010	7:03:16 PM	Helium valve closed
4/3/2010	7:03:16 PM	H2 valve closed
4/3/2010	7:03:16 PM	BCl3 valve closed
4/3/2010	7:03:16 PM	PH3 valve closed
4/3/2010	7:03:16 PM	SiCl4 pre valve closed
4/3/2010	7:03:16 PM	SiCl4 post valve closed
4/3/2010	7:03:16 PM	Main Vac valve closed
4/3/2010	7:03:16 PM	Bubbler valve closed
4/3/2010	7:03:16 PM	Bypass valve opened
4/3/2010	7:03:16 PM	Helium MFC set to  0.000000
4/3/2010	7:03:16 PM	H2 MFC set to  0.000000
4/3/2010	7:03:16 PM	BCl3 MFC set to  0.000000
4/3/2010	7:03:16 PM	SiCl4 MFC set to  0.000000
4/3/2010	7:03:16 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	7:03:16 PM	Tube furnace set to 0
4/3/2010	7:03:42 PM	Helium valve closed
4/3/2010	7:03:42 PM	H2 valve closed
4/3/2010	7:03:42 PM	BCl3 valve closed
4/3/2010	7:03:42 PM	PH3 valve closed
4/3/2010	7:03:42 PM	SiCl4 pre valve closed
4/3/2010	7:03:42 PM	SiCl4 post valve closed
4/3/2010	7:03:42 PM	Bubbler valve closed
4/3/2010	7:03:42 PM	Main Vac valve opened
4/3/2010	7:03:42 PM	Bypass valve opened
4/3/2010	7:03:42 PM	Helium MFC set to  0.000000
4/3/2010	7:03:42 PM	H2 MFC set to  0.000000
4/3/2010	7:03:42 PM	BCl3 MFC set to  0.000000
4/3/2010	7:03:42 PM	SiCl4 MFC set to  0.000000
4/3/2010	7:03:42 PM	Bypass solenoid MFC set to  0.000000
4/3/2010	7:03:42 PM	Tube furnace set to 0
4/3/2010	7:03:42 PM	Run finished at 7:03 PM
4/3/2010	7:03:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
